Piezoelectrically tuned silicon nitride ring resonator

Typical integrated optical phase tuners alter the effective index. In this paper, we explore tuning by geometric deformation. We show that tuning efficiency, VπL, improves as the device size shrinks down to the optimal bend radius, contrary to conventional index-shift based approaches where VπL remains constant. We demonstrate that this approach is capable of ultra-low power tuning across a full FSR in a low-confinement silicon nitride based ring resonator of 580 μm radius. We demonstrate record performance with VFSR = 16 V, VπL = 3.6 V dB, VπLα = 1.1 V dB, tuning current below 10 nA, and unattenuated tuning response up to 1MHz. We also present optimized designs for high confinement silicon nitride and silicon based platforms with radius down to 80 μm and 45 μm, respectively, with performance well beyond current stateof-the-art. Applications include narrow-linewidth tunable diode lasers for spectroscopy and non-linear optics, optical phased array beamforming networks for RF antennas and LIDAR, and optical filters for WDM telecommunication links. © 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement OCIS codes: (130.3120) Integrated optics devices, (230.5750) Resonators, (230.4685) Optical microelectromechanical